Development and Application of a Novel Microfabricated Device for the In Situ Tensile Testing of 1-D Nanomaterials

被引：70

作者：

Ganesan, Yogeeswaran ^{[1
]}

Lu, Yang ^{[1
]}

Peng, Cheng ^{[1
]}

Lu, Hao ^{[1
]}

Ballarini, Roberto ^{[2
]}

Lou, Jun ^{[1
]}

机构：

[1] Rice Univ, Dept Mech Engn & Mat Sci, Houston, TX 77005 USA

[2] Univ Minnesota, Dept Civil Engn, Minneapolis, MN 55455 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2010年 / 19卷 / 03期

基金：

美国国家科学基金会;

关键词：

In situ; microdevices; nanoindenter; nanomanipulation; nanomechanics; THIN-FILMS; CARBON NANOTUBES; MICROSCOPY; NANOWIRES; MECHANICS; STRENGTH;

D O I：

10.1109/JMEMS.2010.2046014

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on the development and application of a silicon microdevice for the in situ quantitative mechanical characterization of single 1-D nanomaterials within a scanning electron microscope equipped with a quantitative nanoindenter. The design makes it possible to convert a compressive nanoindentation force applied to a shuttle to uniaxial tension on a specimen attached to a sample stage. Finite-element analysis and experimental calibration have been employed to extract the specimen stress versus strain curve from the indentation load versus displacement curve. The stress versus strain curves for three 200-300-nm-diameter Ni nanowire specimens are presented and analyzed.

引用

页码：675 / 682

页数：8

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