Power transfer and mode transitions in low-frequency inductively coupled plasmas

被引：100

作者：

Ostrikov, KN

Xu, S

Yu, MY

机构：

[1] Nanyang Technol Univ, NIE, Plasma Proc Lab, Singapore 259756, Singapore

[2] Flinders Univ S Australia, Dept Phys, Adelaide, SA 5001, Australia

[3] Ruhr Univ Bochum, Inst Theoret Phys 1, D-44780 Bochum, Germany

[4] Nanyang Technol Univ, Sch Elect & Elect Engn, Singapore 639798, Singapore

来源：

JOURNAL OF APPLIED PHYSICS | 2000年 / 88卷 / 05期

关键词：

D O I：

10.1063/1.1289055

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Operation and mode jumps in low-frequency (500 kHz) radio-frequency inductively coupled plasmas are investigated. The discharge is driven by a flat inductive coil which can excite the electrostatic (E) and electromagnetic (H) discharge modes. The power transfer efficiency and mode transition behavior are studied. It is found that the power reflection coefficient as a function of the input power is minimal in the vicinity of the mode transitions and exhibits hysteresis, which is also observed when the operating gas pressure is varied. (C) 2000 American Institute of Physics. [S0021-8979(00)01419-5].

引用

页码：2268 / 2271

页数：4

共 19 条

[1] MULTIPLE STEADY-STATES IN ELECTRON-CYCLOTRON-RESONANCE PLASMA REACTORS [J].

AYDIL, ES ;

GREGUS, JA ;

GOTTSCHO, RA .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (06) :2883-2892

[2] Characterization and modeling of a Helicon plasma source [J].

Cheetham, AD ;

Rayner, JP .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (05) :2777-2784

[3] Characterization of the E to H transition in a pulsed inductively coupled plasma discharge with internal coil geometry: bi-stability and hysteresis [J].

Cunge, G ;

Crowley, B ;

Vender, D ;

Turner, MM .

PLASMA SOURCES SCIENCE & TECHNOLOGY, 1999, 8 (04) :576-586

[4] Hysteresis in the E- to H-mode transition in a planar coil, inductively coupled rf argon discharge [J].

El-Fayoumi, IM ;

Jones, IR ;

Turner, MM .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1998, 31 (21) :3082-3094

[5] Capacitive, inductive and helicon-wave modes of operation of a helicon plasma source [J].

Ellingboe, AR ;

Boswell, RW .

PHYSICS OF PLASMAS, 1996, 3 (07) :2797-2804

[6] Test-wave measurements of microwave absorption efficiency in a planar surface-wave plasma reactor [J].

Ghanashev, I ;

Morita, S ;

Toyoda, N ;

Nagatsu, M ;

Sugai, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1999, 38 (7B) :4313-4320

[7] Mode jumps and hysteresis in surface-wave sustained microwave discharges [J].

Ghanashev, I ;

Nagatsu, M ;

Xu, G ;

Sugai, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1997, 36 (7B) :4704-4710

[8] Surface wave eigenmodes in a finite-area plane microwave plasma [J].

Ghanashev, I ;

Nagatsu, M ;

Sugai, H .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (1A) :337-344

[9] Large-area high-density plasma excitation using standing pure and hybrid surface waves [J].

Ghanashev, I ;

Nagatsu, M ;

Morita, S ;

Sugai, H .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1998, 16 (03) :1537-1541

[10] Hot plasma and nonlinear effects in inductive discharges [J].

Godyak, VA ;

Piejak, RB ;

Alexandrovich, BM ;

Kolobov, VI .

PHYSICS OF PLASMAS, 1999, 6 (05) :1804-1812

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