Machining characterization of the nano-lithography process using atomic force microscopy

被引：133

作者：

Fang, TH ^{[1
]}

Weng, CI ^{[1
]}

Chang, JG ^{[1
]}

机构：

[1] Natl Cheng Kung Univ, Dept Mech Engn, Tainan 70101, Taiwan

来源：

NANOTECHNOLOGY | 2000年 / 11卷 / 03期

关键词：

D O I：

10.1088/0957-4484/11/3/308

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The machining characteristics of nano-lithography are studied using atomic force microscopy (AFM). Scribing (scratching) experiments containing reciprocal single line furrows and multiple furrows are conducted to investigate the influence of the working parameters on the machined surface's properties, and upon the machining efficiency. The influence of the working parameters, including the applied load on the cantilever, scribing cycles, scribing speed and scribing feed, on the surface roughness, surface depth and material removal rate can then be accessed. Results indicate that the applied load is more significant than the scribing cycles on the groove depth. However, rougher surfaces are produced at larger loads. In multiple furrows produced with larger applied loads in order to obtain deeper furrows, surface roughness is improved by adjusting the scribing feed to a small value.

引用

页码：181 / 187

页数：7

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