Investigations of nano size defects in InP induced by swift iron ions

被引：9

作者：

Dubey, R. L.

Dubey, S. K. ^{[1
]}

Yadav, A. D.

Gupta, S. J.

Pandey, S. D.

Rao, T. K. Gundu

Mohanty, T.

Kanjilal, D.

机构：

[1] Univ Bombay, Dept Phys, Bombay 400098, Maharashtra, India

[2] Indian Inst Technol, SAIF, Bombay 400076, Maharashtra, India

[3] Jawaharlal Nehru Univ, Sch Phys Sci, New Delhi 110067, India

[4] Interuniv Accelerator Ctr, New Delhi 110067, India

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 2007年 / 257卷 / 1-2 SPEC. ISS.期

关键词：

swift heavy ion irradiation; Fe ions; InP; AFM; high resolution X-ray diffraction;

D O I：

10.1016/j.nimb.2007.01.093

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Indium phosphide (InP) samples were irradiated with swift (100 MeV) Fe-56(7+) ions with different fluences varying from 5 x 10(12) to 2 x 10(14) cm(-2) at room temperature. Atomic force microscopy (AFM) and high resolution X-ray diffraction (HRXRD) have been used to investigate the irradiation effects. AFM observations revealed the presence of nanosized defect clusters in all irradiated InP samples. Size (diameter) and density of defect clusters was found as a function of ion fluence. Root mean square (r.m.s) surface roughnesses measured using the Nanoscope software supplied with the AFM instrument were found to change from 0.33 nm to 7.49 nm. HRXRD studies revealed the presence of radiation-damaged layer (strained peak) in high fluence (2 x 10(14) cm(-2)) Fe ion irradiated InP. The screw dislocations, out of plane strain and lattice mismatch of irradiated samples have been studied. (c) 2007 Elsevier B.V. All rights reserved.

引用

页码：287 / 292

页数：6

共 10 条

[1] THE MEASUREMENT OF THREADING DISLOCATION DENSITIES IN SEMICONDUCTOR CRYSTALS BY X-RAY-DIFFRACTION [J].