MBE deserves a place in the history books

被引:68
作者
McCray, W. Patrick [1 ]
机构
[1] Univ Calif Santa Barbara, Ctr Nanotechnol Soc, Santa Barbara, CA 93106 USA
基金
美国国家科学基金会;
关键词
D O I
10.1038/nnano.2007.121
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Molecular beam epitaxy is widely used in research and industry to make semiconductor devices and structures. However, despite its ability to control matter with near-atomic precision, the technique is overlooked in most histories of nanoscience and nanotechnology. ©2007 Nature Publishing Group.
引用
收藏
页码:259 / 261
页数:3
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