How molecular beam epitaxy (MBE) began and its projection into the future

被引:25
作者
Cho, AY [1 ]
机构
[1] AT&T Bell Labs, Lucent Technol, Murray Hill, NJ 07974 USA
关键词
D O I
10.1016/S0022-0248(98)01265-2
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
This is an extended abstract of a talk given at the International Conference on Molecular Beam Epitaxy in Cannes, France, August 31, 1998. It describes some critical turning points of the development of MBE from basic research to high volume production technology. (C) 1999 Elsevier Science B.V. All rights reserved.
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收藏
页码:1 / 7
页数:7
相关论文
共 22 条
[1]   INTERACTION OF GA AND AS2 MOLECULAR BEAMS WITH GAAS SURFACES [J].
ARTHUR, JR .
JOURNAL OF APPLIED PHYSICS, 1968, 39 (08) :4032-&
[2]   GROWTH OF A GAAS-GAAIAS SUPERLATTICE [J].
CHANG, LL ;
ESAKI, L ;
HOWARD, WE ;
LUDEKE, R .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (01) :11-16
[3]  
Cho A.Y., 1970, I PHYS C SER, V9, P18
[4]   GAAS IMPATT DIODES PREPARED BY MOLECULAR-BEAM EPITAXY [J].
CHO, AY ;
DUNN, CN ;
KUVAS, RL ;
SCHROEDER, WE .
APPLIED PHYSICS LETTERS, 1974, 25 (04) :224-226
[5]   FILM DEPOSITION BY MOLECULAR-BEAM TECHNIQUES [J].
CHO, AY .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1971, 8 (05) :S31-&
[6]   CONTINUOUS ROOM-TEMPERATURE OPERATION OF GAAS-AL-XGA-1-XAS DOUBLE-HETEROSTRUCTURE LASERS PREPARED BY MOLECULAR-BEAM EPITAXY [J].
CHO, AY ;
DIXON, RW ;
CASEY, HC ;
HARTMAN, RL .
APPLIED PHYSICS LETTERS, 1976, 28 (09) :501-503
[7]   SURFACE STRUCTURES AND PHOTOLUMINESCENCE OF MOLECULAR BEAM EPITAXIAL FILMS OF GAAS [J].
CHO, AY ;
HAYASHI, I .
SOLID-STATE ELECTRONICS, 1971, 14 (02) :125-&
[10]   INTERFACE AND DOPING PROFILE CHARACTERISTICS WITH MOLECULAR-BEAM EPITAXY OF GAAS - GAAS VOLTAGE VARACTOR [J].
CHO, AY ;
REINHART, FK .
JOURNAL OF APPLIED PHYSICS, 1974, 45 (04) :1812-1817