FILM DEPOSITION BY MOLECULAR-BEAM TECHNIQUES

被引：147

作者：

CHO, AY

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1971年 / 8卷 / 05期

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D O I：

10.1116/1.1316387

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：S31 / &

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