Biaxially stretchable "Wavy" silicon nanomembranes

被引：327

作者：

Choi, Won Mook

Song, Jizhou

Khang, Dahl-Young

Jiang, Hanqing

Huang, Yonggang Y.

Rogers, John A. ^{[1
]}

机构：

[1] Univ Illinois, Dept Mat Sci & Engn, Dept Chem, Beckman Inst Adv Sci & Technol, Urbana, IL 61801 USA

[2] Univ Illinois, Frederick Seitz Mat Res Lab, Urbana, IL 61801 USA

[3] Arizona State Univ, Dept Mech & Aerosp Engn, Tempe, AZ 85287 USA

[4] Univ Illinois, Dept Mech Sci & Engn, Urbana, IL 61801 USA

来源：

NANO LETTERS | 2007年 / 7卷 / 06期

关键词：

D O I：

10.1021/nl0706244

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

This Letter introduces a biaxially stretchable form of single crystalline silicon that consists of two dimensionally buckled, or "wavy", silicon nanomembranes on elastomeric supports. Fabrication procedures for these structures are described, and various aspects of their geometries and responses to uniaxial and biaxial strains along various directions are presented. Analytical models of the mechanics of these systems provide a framework for quantitatively understanding their behavior. These classes of materials might be interesting as a route to high-performance electronics with full, two-dimensional stretchability.

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页码：1655 / 1663

页数：9

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