Dual-source atmospheric pressure CVD of amorphous molybdenum phosphide films on glass using molybdenum(v) chloride and cyclohexylphosphine

被引:12
作者
Blackman, CS
Carmalt, CJ
Manning, TD
O'Neill, SA
Parkin, IP
Apostolico, L
Molloy, KC
机构
[1] UCL, Christopher Ingold Labs, Dept Chem, London WC1H 0AJ, England
[2] Univ Bath, Dept Chem, Bath BA2 7AY, Avon, England
关键词
D O I
10.1002/cvde.200290000
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Molybdenum phosphide films are deposited on glass from MOCl(5) and 2P(C(6)H(11))H(2). The atmospheric pressure depositions are carried out at 550 and 600degreesC producing silver brown shiny films. The composition of the film is shown to be MoP(1.8) with a resistivity value of ca. 3800 muOmega cm. X-ray analysis of the deposited films indicates that they are amorphous. XPS analysis revealed binding energy shifts of 228.4 eV for Mo3d(5/2) and 128.8 eV for P2p. The deposits passed the scotch test and could not be scratched with steel or brass scalpels. They are also resistant to common solvents but dissolve in concentrated acids.
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页码:10 / +
页数:5
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