A comprehensive model of PMOS NBTI degradation

被引:538
作者
Alam, MA
Mahapatra, S
机构
[1] Agere Syst, Allentown, PA USA
[2] Indian Inst Technol, Dept Elect Engn, Bombay, Maharashtra, India
关键词
D O I
10.1016/j.microrel.2004.03.019
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Negative bias temperature instability has become an important reliability concern for ultra-scaled Silicon IC technology with significant implications for both analog and digital circuit design. In this paper, we construct a comprehensive model for NBTI phenomena within the framework of the standard reaction-diffusion model. We demonstrate how to solve the reaction-diffusion equations in a way that emphasizes the physical aspects of the degradation process and allows easy generalization of the existing work. We also augment this basic reaction-diffusion model by including the temperature and field-dependence of the NBTI phenomena so that reliability projections can be made under arbitrary circuit operating conditions. (C) 2004 Published by Elsevier Ltd.
引用
收藏
页码:71 / 81
页数:11
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