The effect of DC bias on the synthesis of crystalline carbon nitrides on silicon by microwave plasma enhanced chemical vapor deposition (CVD)

被引:27
作者
Sung, SL
Tsai, TG
Huang, KP
Huang, JH
Shih, HC [1 ]
机构
[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan
[2] Natl Chung Hsing Univ, Inst Mat Engn, Taichung, Taiwan
[3] Natl Tsing Hua Univ, Ctr Mat Sci, Hsinchu 300, Taiwan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1998年 / 37卷 / 2A期
关键词
crystalline carbon nitride; negative dc bias; Si3N4; MPECVD;
D O I
10.1143/JJAP.37.L148
中图分类号
O59 [应用物理学];
学科分类号
摘要
Crystalline carbon nitride compounds have been successfully deposited on a silicon wafer over an intermediate layer of Si3N4 formed by chemical conversion of the silicon using a microwave plasma enhanced chemical vapor deposition (MPECVD) process. Both nitrogen and methane were used as the primary precursors for the initial nitriding of silicon and the subsequent formation of crystalline carbon nitride. In the later step, a negative de bias of -150V was applied to the nitrided silicon substrate. The crystalline carbon nitride compounds were characterized by X-ray diffractometer and X-ray photoelectron spectroscopy and compared to alpha- and beta-Si3N4. It should be noted that crystalline carbon nitride has never been observed to form simply by reaction of solid carbon with nitrogen plasma Application of a negative de bias to the substrate has proved to be a prerequisite for the formation of carbon nitride in this study.
引用
收藏
页码:L148 / L150
页数:3
相关论文
共 18 条
  • [11] PREDICTION OF NEW LOW COMPRESSIBILITY SOLIDS
    LIU, AY
    COHEN, ML
    [J]. SCIENCE, 1989, 245 (4920) : 841 - 842
  • [12] SYNTHESIS OF CARBON NITRIDE IN PLASMA-ARC
    MATSUMOTO, O
    KOTAKI, T
    SHIKANO, H
    TAKEMURA, K
    TANAKA, S
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1994, 141 (02) : L16 - L18
  • [13] EXPERIMENTAL REALIZATION OF THE COVALENT SOLID CARBON NITRIDE
    NIU, CM
    LU, YZ
    LIEBER, CM
    [J]. SCIENCE, 1993, 261 (5119) : 334 - 337
  • [14] SUNG CP, 1990, CHIN J MATER SCI, V22, P273
  • [15] CHEMICAL PREPARATION AND SHOCK-WAVE COMPRESSION OF CARBON NITRIDE PRECURSORS
    WIXOM, MR
    [J]. JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1990, 73 (07) : 1973 - 1978
  • [16] Optical emission spectroscopy of the nitrogen arc in an arc-heated beam source used for synthesis of carbon nitride films
    Xu, N
    Du, YC
    Ying, ZF
    Ren, ZM
    Li, FM
    Lin, J
    Ren, YZ
    Zong, XF
    [J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1997, 30 (09) : 1370 - 1376
  • [17] OBSERVATION OF CRYSTALLINE C3N4
    YU, KM
    COHEN, ML
    HALLER, EE
    HANSEN, WL
    LIU, AY
    WU, IC
    [J]. PHYSICAL REVIEW B, 1994, 49 (07) : 5034 - 5037
  • [18] Zhang YF, 1996, APPL PHYS LETT, V68, P634, DOI 10.1063/1.116492