High-frequency characterization of sub-0.25-μm fully depleted silicon-on-insulator MOSFETs

被引:9
作者
Chen, CL [1 ]
Mathews, RH [1 ]
Burns, JA [1 ]
Wyatt, PW [1 ]
Yost, DR [1 ]
Chen, CK [1 ]
Fritze, M [1 ]
Knecht, JM [1 ]
Suntharalingam, V [1 ]
Soares, A [1 ]
Keast, CL [1 ]
机构
[1] MIT, Lincoln Lab, Lexington, MA 02420 USA
关键词
CMOS; microwave field effect transistors; MOSFET; silicon on insulator; SIMOX;
D O I
10.1109/55.870613
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A cutoff frequency, f(T), of 85 GHz was measured on a fully-depleted silicon-on-insulator (FDSOI) n-MOSFET with a gate length of 0.15 mu m. The p-MOSFET with 0.22-mu m gate length has an f(T) of 42 GHz. The high-frequency equivalent circuits were derived from scattering parameters for MOSFETs with various gate lengths. The effects of gate Length and other device parameters on the performance of FDSOI MOSFETs at RF are discussed.
引用
收藏
页码:497 / 499
页数:3
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