In situ observation of carbon-nanopi liar tubulization process

被引:7
作者
Ichihashi, T
Ishida, M
Ochiai, Y
Fujita, J
机构
[1] NEC Corp Ltd, Fundamental & Environm Res Labs, Tsukuba, Ibaraki 3058501, Japan
[2] CREST JST, Kawaguchi 3320012, Japan
[3] Univ Tsukuba, Inst Appl Phys, Tsukuba, Ibaraki 3058573, Japan
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2004年 / 22卷 / 06期
关键词
D O I
10.1116/1.1808713
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We observed the tubulization process of amorphous carbon nanopillars using an in situ transmission electron microscopy. Amorphous carbon nanopillars were grown by electron-beam-induced chemical vapor deposition on an iron-doped carbon foundation. Amorphous carbon nanopillars were transformed into graphitic tubules by annealing at about 650 degreesC in the presence of iron nanoparticles supplied from the iron-doped carbon foundation. A molten catalyst nanoparticle penetrated an amorphous carbon nanopillar, dissolving it and leaving a graphite track behind. This graphitic nanotube synthesis technique using nanofabrication promises to bring about a great advance in nanotube electronic devices. (C) 2004 American Vacuum Society.
引用
收藏
页码:3221 / 3223
页数:3
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