Atomic resolution composition analysis by scanning transmission electron microscopy high-angle annular dark-field imaging

被引：27

作者：

Carlino, E

Modesti, S

Furlanetto, D

Piccin, M

Rubini, S

Franciosi, A

机构：

[1] INFM, Lab Nazl TASC, I-34012 Trieste, Italy

[2] Univ Trieste, Dipartimento Fis, I-34127 Trieste, Italy

来源：

APPLIED PHYSICS LETTERS | 2003年 / 83卷 / 04期

关键词：

D O I：

10.1063/1.1592314

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The silicon concentration profile in Si-GaAs (001) superlattices grown by molecular beam epitaxy was investigated using scanning transmission electron microscopy high-angle annular dark-field (HAADF) imaging. Comparison with atomic resolution results obtained through cross-sectional scanning tunneling microscopy indicates that, by choosing appropriate experimental conditions, HAADF imaging can be used to gauge the Si distribution in GaAs on the atomic scale even without any image simulation. (C) 2003 American Institute of Physics.

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页码：662 / 664

页数：3

相关论文

共 21 条

[1] An approach to quantitative compositional profiling at near-atomic resolution using high-angle annular dark field imaging [J].

Anderson, SC ;

Birkeland, CR ;

Anstis, GR ;

Cockayne, DJH .

ULTRAMICROSCOPY, 1997, 69 (02) :83-103

[2] THE LATTICE LOCATIONS OF SILICON ATOMS IN DELTA-DOPED LAYERS IN GAAS [J].

ASHWIN, MJ ;

FAHY, M ;

HARRIS, JJ ;

NEWMAN, RC ;

SANSOM, DA ;

ADDINALL, R ;

MCPHAIL, DS ;

SHARMA, VKM .

JOURNAL OF APPLIED PHYSICS, 1993, 73 (02) :633-639

[3] Sub-angstrom resolution using aberration corrected electron optics [J].

Batson, PE ;

Dellby, N ;

Krivanek, OL .

NATURE, 2002, 418 (6898) :617-620

[4] BLOCH WAVES AND THEIR CORRESPONDING ATOMIC AND MOLECULAR-ORBITALS IN HIGH-ENERGY ELECTRON-DIFFRACTION [J].

BUXTON, BF ;

LOVELUCK, JE ;

STEEDS, JW .

PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1978, 38 (03) :259-278

[5] Practical aspects of atomic resolution imaging and analysis in STEM [J].

James, EM ;

Browning, ND .

ULTRAMICROSCOPY, 1999, 78 (1-4) :125-139

[6]

Kittel C., 2018, Introduction to solid state physics, V8th

[7] High-resolution potential mapping in semiconductor nanostructures by cross-sectional scanning tunneling microscopy and spectroscopy [J].

Modesti, S ;

Furlanetto, D ;

Piccin, M ;

Rubini, S ;

Franciosi, A .

APPLIED PHYSICS LETTERS, 2003, 82 (12) :1932-1934

[8]

MODESTI S, UNPUB

[9] Accurate structure determination from image reconstruction in ADF STEM [J].

Nellist, PD ;

Pennycook, SJ .

JOURNAL OF MICROSCOPY-OXFORD, 1998, 190 :159-170

[10] Incoherent imaging using dynamically scattered coherent electrons [J].

Nellist, PD ;

Pennycook, SJ .

ULTRAMICROSCOPY, 1999, 78 (1-4) :111-124