Passivation of SiO2/Si interfaces using high-pressure-H2O-vapor heating

被引:39
作者
Sakamoto, K [1 ]
Sameshima, T [1 ]
机构
[1] Tokyo Univ Agr & Technol, Koganei, Tokyo 1848588, Japan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2000年 / 39卷 / 5A期
关键词
SiOx; Si-O-Si bonding state; activation energy for oxidation; density of interface trap state; surface recombination velocity;
D O I
10.1143/JJAP.39.2492
中图分类号
O59 [应用物理学];
学科分类号
摘要
High-pressure H2O vapor heating was used for the passivation of silicon surface. The thermally evaporated SiOx films formed on the silicon surface was oxidized and Si-O bonding density increased with an activation energy of 0.035 eV with increasing heating temperature upon heat treatment with 1.0 x 10(6) Pa H2O vapor. The peak wave number and full width at half maximum of the Si-O absorption band due to the Si-O-Si antisymmetric stretching vibration mode were changed to 1077 cm(-1) and 72 cm(-1), respectively. The density of silicon dangling bonds was reduced from 2.0 x 10(17)(as deposited) to 1.4 x 10(15) cm(-3) by heat treatment. The effective surface recombination velocity of the p-type silicon wafer that was coated with SiOx films was markedly reduced from 405 cm/s (as deposited) to 13 cm/s by heat treatment with 2.1 x 10(6) Pa-H2O vapor at 260 degrees C for 3 h. The interfaces retained the low recombination velocity 8000 h after keeping the sample in air. Effective field effect passivation was demonstrated using a SiOx/SiO2 double layered structure formed by the combination of thermal evaporation and heat treatment with high-pressure H2O vapor.
引用
收藏
页码:2492 / 2496
页数:5
相关论文
共 11 条
[1]   INJECTION-LEVEL DEPENDENT SURFACE RECOMBINATION VELOCITIES AT THE SILICON-PLASMA SILICON-NITRIDE INTERFACE [J].
ABERLE, AG ;
LAUINGER, T ;
SCHMIDT, J ;
HEZEL, R .
APPLIED PHYSICS LETTERS, 1995, 66 (21) :2828-2830
[2]   PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITED OXIDE FOR LOW SURFACE RECOMBINATION VELOCITY AND HIGH EFFECTIVE LIFETIME IN SILICON [J].
CHEN, Z ;
PANG, SK ;
YASUTAKE, K ;
ROHATGI, A .
JOURNAL OF APPLIED PHYSICS, 1993, 74 (04) :2856-2859
[3]  
ELGAMEL HE, 1994, P 1 WORLD C PHOT EN, P1323
[4]   ELECTRON-HOLE RECOMBINATION IN GERMANIUM [J].
HALL, RN .
PHYSICAL REVIEW, 1952, 87 (02) :387-387
[5]   Effect of hydrogen-radical annealing for SiO2 passivation [J].
Nagayoshi, H ;
Onozawa, Y ;
Ikeda, M ;
Yamaguchi, M ;
Yamamoto, Y ;
Uematsu, T ;
Saitoh, T ;
Kamisako, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1996, 35 (8B) :L1047-L1049
[6]   Improvement of SiO2 properties by heating treatment in high pressure H2O vapor [J].
Sameshima, T ;
Satoh, M .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1997, 36 (6A) :L687-L689
[7]   Defect reduction and surface passivation of SiO2/Si by heat treatment with high-pressure H2O vapor [J].
Sameshima, T ;
Sakamoto, K ;
Asada, K .
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 69 (02) :221-224
[8]   Heat treatment in high pressure H2O vapor used for improvement of Si-O bonding network near SiO2/Si interface [J].
Sameshima, T ;
Sakamoto, K ;
Satoh, M .
THIN SOLID FILMS, 1998, 335 (1-2) :138-141
[9]   STATISTICS OF THE RECOMBINATIONS OF HOLES AND ELECTRONS [J].
SHOCKLEY, W ;
READ, WT .
PHYSICAL REVIEW, 1952, 87 (05) :835-842
[10]   Low-temperature Si oxidation using inductively coupled oxygen-argon mixed plasma [J].
Tabakomori, M ;
Ikoma, E .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (9A) :5409-5415