共 39 条
Chemistry of olefin-terminated homogeneous and mixed monolayers on scribed silicon
被引:27
作者:
Yang, Li
Lua, Yit-Yian
Tan, Min
Scherman, Oren A.
Grubbs, Robert H.
Harb, John N.
Davis, Robert C.
Linford, Matthew R.
[1
]
机构:
[1] Brigham Young Univ, Dept Chem & Biochem, Provo, UT 84602 USA
[2] CALTECH, Dept Chem, Pasadena, CA 91125 USA
[3] Brigham Young Univ, Dept Chem Engn, Provo, UT 84602 USA
[4] Brigham Young Univ, Dept Phys & Astron, Provo, UT 84602 USA
关键词:
D O I:
10.1021/cm062735u
中图分类号:
O64 [物理化学(理论化学)、化学物理学];
学科分类号:
070304 ;
081704 ;
摘要:
We describe the preparation of homogeneous olefin-terminated monolayers on scribed silicon made from 1,9-decadiene, and mixed monolayers with varying degrees of olefin termination prepared from 1,9-decadiene and 1-decene or 1-octene, and their subsequent reactions with bromine, osmium tetroxide, dicholorocarbene, and Grubbs' catalyst. Each of these reagents contains a heteroatom, which allows straightforward monitoring of the surface reactions by X-ray photoelectron spectroscopy (XPS). Surface reactions of mixed monolayers made from 1,9-decadiene and 1-octene are consistently more efficient than surface reactions of mixed monolayers made from 1,9-decadiene and 1-decene, presumably because of steric effects. After chemisorbtion of Grubbs' catalyst, ring-opening metathesis polymerization (ROMP) of norbornene is demonstrated. The kinetics of Grubbs' catalyst adsorption and of polynorbornene growth is monitored by XPS and time-of-flight secondary ion mass spectrometry (ToF-SIMS). A principal components analysis (PCA) of the ToF-SIMS data is presented. Autoscaling is shown to be a relatively ineffective preprocessing method for this data. Polynorbornene features on patterned substrates effectively resist and direct the electroless deposition of copper.
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页码:1671 / 1678
页数:8
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