Squeeze film air damping in MEMS

被引：598

作者：

Bao, Minhang ^{[1
]}

Yang, Heng

机构：

[1] Fudan Univ, State Key Lab ASIC & Syst, Shanghai 200433, Peoples R China

[2] Chinese Acad Sci, State Key Lab Transducer Technol, Shanghai Inst Micro Syst & Informat Technol, Shanghai 200050, Peoples R China

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2007年 / 136卷 / 01期

基金：

中国国家自然科学基金;

关键词：

squeeze film air damping; Reynolds equation; simulation;

D O I：

10.1016/j.sna.2007.01.008

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The paper presents an overview and reports the recent progress of research on squeeze film air damping in MEMS. The review starts with the governing equations of squeeze film air damping: the nonlinear isothermal Reynolds equation and various reduced forms of the equation for different conditions. After the basic effects of squeeze film damping on the dynamic performances of micro- structures are discussed based on the analytical solutions to parallel plate problems, recent research on various aspects of squeeze film air damping are reviewed, including the squeeze film air damping of perforated and slotted plate, the squeeze film air damping in rarefied air and the squeeze film air damping of torsion mirrors. Finally, the simulation of squeeze film air damping is reviewed. For quick reference, important equations and curves are included. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：3 / 27

页数：25

共 70 条

[1] ACCELEROMETER SYSTEMS WITH SELF-TESTABLE FEATURES [J].

ALLEN, HV ;

TERRY, SC ;

DEBRUIN, DW .

SENSORS AND ACTUATORS, 1989, 20 (1-2) :153-161

[2] A COMPARISON OF SQUEEZE-FILM THEORY WITH MEASUREMENTS ON A MICROSTRUCTURE [J].

ANDREWS, M ;

HARRIS, I ;

TURNER, G .

SENSORS AND ACTUATORS A-PHYSICAL, 1993, 36 (01) :79-87

[3]

[Anonymous], 1949, Scientific Foundations of Vacuum Technique

[4]

*ANSYS INC, 2004, ANSYS DOC VERS 8 1

[5] Mass flow and tangential momentum accommodation in silicon micromachined channels [J].

Arkilic, EB ;

Breuer, KS ;

Schmidt, MA .

JOURNAL OF FLUID MECHANICS, 2001, 437 :29-43

[6]

BAO M, 2005, ANAL DESIGN PRINCIPL, pCH3

[7]

BAO M, 2000, MICROMECHANICAL TRAN, pCH3

[8] Squeeze-film air damping of thick hole-plate [J].

Bao, MH ;

Yang, H ;

Sun, YC ;

Wang, YL .

SENSORS AND ACTUATORS A-PHYSICAL, 2003, 108 (1-3) :212-217

[9] Modified Reynolds' equation and analytical analysis of squeeze-film air damping of perforated structures [J].

Bao, MH ;

Yang, H ;

Sun, YC ;

French, PJ .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2003, 13 (06) :795-800

[10] Energy transfer model for squeeze-film air damping in low vacuum [J].

Bao, MH ;

Yang, H ;

Yin, H ;

Sun, YC .

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2002, 12 (03) :341-346

← 1 2 3 4 5 6 7 →