DLC thin film preparation by cathodic arc deposition with a super droplet-free system

被引：76

作者：

Takikawa, H ^{[1
]}

Izumi, K ^{[1
]}

Miyano, R ^{[1
]}

Sakakibara, T ^{[1
]}

机构：

[1] Toyohashi Univ Technol, Dept Elect & Elect Engn, Toyohashi, Aichi 4418580, Japan

来源：

SURFACE & COATINGS TECHNOLOGY | 2003年 / 163卷

基金：

日本学术振兴会;

关键词：

diamond-like carbon film; magnetically filtered arc deposition; macrodroplets; T-shape duct;

D O I：

10.1016/S0257-8972(02)00629-1

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Diamond-like carbon films, which are fabricated by means of a cathodic vacuum arc with a graphite cathode, are investigated from the viewpoint of the number of macrodroplets on the film observed with an optical microscope. A straight-type filtered arc deposition (Linear-FAD) system, a 45degrees torus-type filtered arc deposition (Torus-FAD) system, and a newly developed T-shape filtered are deposition (T-FAD) system were tested, comparing them with a normal cathodic arc deposition (normal-CAD) system and a shielded cathodic arc deposition (S-CAD) system. The three filtered arc deposition (FAD) type systems showed a remarkable reduction in graphite macrodroplets. Among the FADs, T-FAD drastically reduced the number of macrodroplets to 0.2-0.4% of that for normal-CAD and S-CAD, and to approximately 1% of that for Linear-FAD and Torus-FAD. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：368 / 373

页数：6

共 11 条

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