Temperature distribution of wedge-shaped specimen in TEM

被引：7

作者：

Chen, Lu

Wang, Yong ^{[1
]}

Zhang, Ze ^{[1
]}

机构：

[1] Zhejiang Univ, Sch Mat Sci & Engn, Ctr Electron Microscopy, Hangzhou 310027, Zhejiang, Peoples R China

来源：

MICRON | 2018年 / 110卷

基金：

中国国家自然科学基金;

关键词：

Electron irradiation; Heating effect; FIB specimen; In-situ TEM; FOCUSED ION-BEAM; ELECTRON; DAMAGE;

D O I：

10.1016/j.micron.2018.04.007

中图分类号：

TH742 [显微镜];

学科分类号：

080401 [精密仪器及机械];

摘要：

Understanding the electron irradiation effects, especially the heating effect, is very important to the in-situ TEM experiments. A model is established to describe the temperature distribution of FIB prepared wedge-shaped specimen induced by electron irradiation, and a Cu2Se specimen is presented to estimate the temperature distribution inside the observed area under different dose rates in an in-situ TEM heating experiments. The result indicates that in normal situations, the electron irradiation caused temperature inhomogeneity inside the observed area is ignorable.

引用

页码：46 / 49

页数：4

共 15 条

[1]

Chen L., UNPUB

[2]

BEAM HEATING IN AN ASYMMETRICALLY ILLUMINATED THIN CIRCULAR FILM [J].