Shear-force detection based on an external cavity laser interferometer for a compact scanning near field optical microscope

被引：12

作者：

Pfeffer, M ^{[1
]}

Lambelet, P ^{[1
]}

Marquis-Weible, F ^{[1
]}

机构：

[1] Ecole Polytech Fed Lausanne, Inst Opt Appl, CH-1015 Lausanne, Switzerland

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 1997年 / 68卷 / 12期

关键词：

D O I：

10.1063/1.1148450

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A compact near field optical microscope module is presented, with shear-force detection based on an external cavity laser interferometer. Its Al2O3 structure allows minimal sensitivity towards thermal and mechanical perturbations. Together with a precise and easy-to-handle tip fixation system, involving standard commercially available elements, this module is simple to use, and allows to detect a minimum displacement of 5.9 pm(rms)/root Hz, with a large working distance of 10.5 mm. (C) 1997 American Institute of Physics.

引用

页码：4478 / 4482

页数：5

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