In situ reflectance-difference spectroscopy of doped CdTe and ZnTe grown by molecular beam epitaxy

被引:6
作者
Balderas-Navarro, RE
Hingerl, K
Hilber, W
Stifter, D
Bonanni, A
Sitter, H
机构
[1] Johannes Kepler Univ Linz, Inst Halbleiterphys & Festkorperphys, A-4040 Linz, Austria
[2] Profactor GMBH, A-4400 Steyr, Austria
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2000年 / 18卷 / 04期
关键词
D O I
10.1116/1.1306282
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
We have used reflectance-difference (RD spectroscopy (UW-visible energy range) during the growth and doping process of CdTe(001) and ZnTe(001) layers by molecular beam epitaxy (MBE), The MBE chamber is equipped with an electron cyclotron resonance cell to generate N plasma and a ZnCl2 effusion cell for the p- and n-type doping, respectively. After the first stages of the growth and prior doping, different spectral features were found as we changed from Cd or Zn to Te stabilized conditions due to surface anisotropy. However, as the doping of the growing layer further increased, the RD spectra of both surfaces showed resonances around E-1 and E-1+Delta(1) interband transitions due to the linear electro optic (LEO) effect, Although RD spectra exhibit similar line shapes dominated by surface transitions, differences due to the LEO can be isolated. Different Fermi level pinning mechanisms are proposed for both materials because the RD measurements of the LEO strongly depend on surface termination. (C) 2000 American Vacuum Society. [S0734-211X(00)06704-4].
引用
收藏
页码:2224 / 2228
页数:5
相关论文
共 26 条
[1]   MEASUREMENTS OF ABOVE-BANDGAP OPTICAL ANISOTROPIES IN THE (001) SURFACE OF GAAS [J].
ACOSTAORTIZ, SE ;
LASTRASMARTINEZ, A .
SOLID STATE COMMUNICATIONS, 1987, 64 (05) :809-811
[2]   ANISOTROPIES IN THE ABOVE BAND-GAP OPTICAL-SPECTRA OF CUBIC SEMICONDUCTORS [J].
ASPNES, DE ;
STUDNA, AA .
PHYSICAL REVIEW LETTERS, 1985, 54 (17) :1956-1959
[3]   Dependence of thermal annealing on the density distribution of interface states in Ti/n-GaAs(Te) Schottky diodes [J].
Ayyildiz, E ;
Bati, B ;
Temirci, C ;
Türüt, A .
APPLIED SURFACE SCIENCE, 1999, 152 (1-2) :57-62
[4]   Nitrogen doping of Te-based II-VI compounds during growth by molecular beam epitaxy [J].
Baron, T ;
Saminadayar, K ;
Magnea, N .
JOURNAL OF APPLIED PHYSICS, 1998, 83 (03) :1354-1370
[5]   Recent developments and progress on electrical contacts to CdTe, CdS and ZnSe with special reference to barrier contacts to CdTe [J].
Dharmadasa, IM .
PROGRESS IN CRYSTAL GROWTH AND CHARACTERIZATION OF MATERIALS, 1998, 36 (04) :249-290
[6]   CONTACTLESS ELECTRICAL CHARACTERIZATION AND REALIZATION OF P-TYPE ZNSE [J].
FARRELL, HH ;
TAMARGO, MC ;
GMITTER, TJ ;
WEAVER, AL ;
ASPNES, DE .
JOURNAL OF APPLIED PHYSICS, 1991, 70 (02) :1033-1035
[7]   Atomic and electronic structure of the CdTe(001) surface:: LDA and GW calculations [J].
Gundel, S ;
Fleszar, A ;
Faschinger, W ;
Hanke, W .
PHYSICAL REVIEW B, 1999, 59 (23) :15261-15269
[8]   Surface processing of CdTe compound semiconductor by excimer laser doping [J].
Hatanaka, Y ;
Niraula, M ;
Aoki, Y ;
Aoki, T ;
Nakanishi, Y .
APPLIED SURFACE SCIENCE, 1999, 142 (1-4) :227-232
[9]   REFLECTANCE-DIFFERENCE SPECTROSCOPY OF (001) GAAS-SURFACES IN ULTRAHIGH-VACUUM [J].
KAMIYA, I ;
ASPNES, DE ;
FLOREZ, LT ;
HARBISON, JP .
PHYSICAL REVIEW B, 1992, 46 (24) :15894-15904
[10]   Properties of epitaxially grown CdTe layers doped with indium [J].
Karczewski, G ;
Zakrzewski, AK ;
Dobaczewski, L ;
Dobrowolski, W ;
Grodzicka, E ;
Jaroszynski, J ;
Wojtowicz, T ;
Kossut, J .
THIN SOLID FILMS, 1995, 267 (1-2) :79-83