Large-area three-dimensional structuring by electrochemical etching and lithography

被引：100

作者：

Matthias, S

Müller, F

Jamois, C

Wehrspohn, RB

Gösele, U

机构：

[1] Max Planck Inst Microstruct Phys, D-06120 Halle Saale, Germany

[2] Univ Gesamthsch Paderborn, Dept Phys, D-33098 Paderborn, Germany

来源：

ADVANCED MATERIALS | 2004年 / 16卷 / 23-24期

关键词：

D O I：

10.1002/adma.200400436

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The fabrication of three-dimensional silicon networks (see Figure) via a self-stabilized electrochemical etching technique onto lithographically pre-structured substrates is demonstrated. The optical characterization confirms a complete three-dimensional photonic bandgap of about 4% centered at 3 mum.

引用

收藏

页码：2166 / +

页数：6

相关论文

共 32 条

[11] Block-iterative frequency-domain methods for Maxwell's equations in a planewave basis [J].

Johnson, SG ;

Joannopoulos, JD .

OPTICS EXPRESS, 2001, 8 (03) :173-190

[12]

Koenderink AF, 2003, PHYS STATUS SOLIDI A, V197, P648, DOI [10.1002/pssa.200303115, 10.1002/pssb.200303115]

[13] Tunable inverse opal hydrogel pH sensors [J].

Lee, YJ ;

Braun, PV .

ADVANCED MATERIALS, 2003, 15 (7-8) :563-566

[14] The limits of macropore array fabrication [J].

Lehmann, V ;

Gruning, U .

THIN SOLID FILMS, 1997, 297 (1-2) :13-17

[15] FORMATION MECHANISM AND PROPERTIES OF ELECTROCHEMICALLY ETCHED TRENCHES IN N-TYPE SILICON [J].

LEHMANN, V ;

FOLL, H .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1990, 137 (02) :653-659

[16] THE PHYSICS OF MACROPORE FORMATION IN LOW DOPED N-TYPE SILICON [J].

LEHMANN, V .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1993, 140 (10) :2836-2843

[17] Complete three-dimensional band gap in macroporous silicon photonic crystals [J].

Leonard, SW .

APPLIED PHYSICS LETTERS, 2002, 81 (16) :2917-2919

[18] Functionalized silicon membranes for selective bio-organism capture [J].

Létant, SE ;

Hart, BR ;

Van Buuren, AW ;

Terminello, LJ .

NATURE MATERIALS, 2003, 2 (06) :391-396

[19] A three-dimensional photonic crystal operating at infrared wavelengths [J].

Lin, SY ;

Fleming, JG ;

Hetherington, DL ;

Smith, BK ;

Biswas, R ;

Ho, KM ;

Sigalas, MM ;

Zubrzycki, W ;

Kurtz, SR ;

Bur, J .

NATURE, 1998, 394 (6690) :251-253

[20] A porous silicon-based optical interferometric biosensor [J].

Lin, VSY ;

Motesharei, K ;

Dancil, KPS ;

Sailor, MJ ;

Ghadiri, MR .

SCIENCE, 1997, 278 (5339) :840-843

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