Growth of CeO2 films on glass substrates using electron-beam-assisted evaporation

被引:15
作者
Sakamoto, N
Inoue, T
Kato, K
机构
[1] Iwaki Meisei Univ, Dept Elect & Comp Sci, Iwaki, Fukushima 9708551, Japan
[2] Fukushima Technol Ctr, Mat Dev Dept, Koriyama, Fukushima 9630215, Japan
关键词
D O I
10.1021/cg025604o
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The growth of CeO2 films on glass substrates using electron-beam-assisted evaporation is investigated. Experiments with varying growth temperatures (room temperature to 750 degreesC) reveal that orientation controlled CeO2 films are obtained. Electron-beam-assisted evaporation enhances preferential orientation and enlarges the grain size of the films.
引用
收藏
页码:115 / 116
页数:2
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