共 38 条
[1]
ALEXANDERS LC, 1993, Patent No. 5189261
[5]
Chung S, 2005, MICROSYST TECHNOL, V11, P424, DOI [10.1007/s00542-004-0475-3, 10.1007/S00542-004-0475-3]
[7]
CORDES SA, 2002, Patent No. 6426241
[9]
ENGEL JM, 2006, P 12 SOL STAT SENS A