学术探索
学术期刊
新闻热点
数据分析
智能评审

Atmospheric-pressure argon/oxygen plasma-discharge source with a stepped electrode

被引：21
作者：
Lim, Jin-Pyo
Uhm, Han S.
Li, Shou-Zhe
机构：
[1] Ajou Univ, Dept Mol Sci & Technol, Suwon 443749, South Korea
[2] Dalian Univ Technol, Dept Phys, Dalian 116024, Peoples R China
[3] Dalian Univ Technol, State Key Lab Mat Modificat Laser Ion & Elect Bea, Dalian 116024, Peoples R China
来源：
APPLIED PHYSICS LETTERS | 2007年 / 90卷 / 05期
关键词：
D O I：
10.1063/1.2450654
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
The nonequilibrium glow discharge in argon mixed with oxygen at atmospheric pressure was generated in a parallel plate reactor with a stepped electrode powered by a 13.56 MHz radio-frequency power supplier. The stepped-electrode reactor consists of a narrow and wide gap structure. A strong electric field occurred at the narrow gap region preionizes Ar/O-2 gas and assists to generate a large volumetric plasma in the wide gap region. Therefore, the stepped-electrode reactor makes it easy to operate Ar/O-2 glow discharge, providing a stable, uniform, and broad plasma jet at atmospheric pressure. (c) 2007 American Institute of Physics.
引用
收藏
页数：3
相关论文
共 15 条
[1]   NONEQUILIBRIUM VOLUME PLASMA CHEMICAL-PROCESSING [J].
ELIASSON, B ;
KOGELSCHATZ, U .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1991, 19 (06) :1063-1077
[2]   MODELING AND APPLICATIONS OF SILENT DISCHARGE PLASMAS [J].
ELIASSON, B ;
KOGELSCHATZ, U .
IEEE TRANSACTIONS ON PLASMA SCIENCE, 1991, 19 (02) :309-323
[3]   IONIZATION ATTACHMENT + BREAKDOWN STUDIES IN OXYGEN [J].
FREELY, JB ;
FISHER, LH .
PHYSICAL REVIEW, 1964, 133 (1A) :A304-A310
[4]   OPEN-AIR PHOTORESIST ASHING BY A COLD-PLASMA TORCH - CATALYTIC EFFECT OF CATHODE MATERIAL [J].
INOMATA, K ;
KOINUMA, H ;
OIKAWA, Y ;
SHIRAISHI, T .
APPLIED PHYSICS LETTERS, 1995, 66 (17) :2188-2190
[5]   DEVELOPMENT AND APPLICATION OF A MICROBEAM PLASMA GENERATOR [J].
KOINUMA, H ;
OHKUBO, H ;
HASHIMOTO, T ;
INOMATA, K ;
SHIRAISHI, T ;
MIYANAGA, A ;
HAYASHI, S .
APPLIED PHYSICS LETTERS, 1992, 60 (07) :816-817
[6]   Comparison of atmospheric-pressure helium and argon plasmas generated by capacitively coupled radio-frequency discharge [J].
Li, Shou-Zhe ;
Lim, Jin-Pyo ;
Kang, Jung G. ;
Uhm, Han S. .
PHYSICS OF PLASMAS, 2006, 13 (09)
[7]   Experimental and theoretical study of a glow discharge at atmospheric pressure controlled by dielectric barrier [J].
Massines, F ;
Rabehi, A ;
Decomps, P ;
Gadri, RB ;
Segur, P ;
Mayoux, C .
JOURNAL OF APPLIED PHYSICS, 1998, 83 (06) :2950-2957
[8]  
NASSER E, 1971, FUNDAMENTALS GASEOUS, V1, P188
[9]   An atmospheric pressure plasma source [J].
Park, J ;
Henins, I ;
Herrmann, HW ;
Selwyn, GS ;
Jeong, JY ;
Hicks, RF ;
Shim, D ;
Chang, CS .
APPLIED PHYSICS LETTERS, 2000, 76 (03) :288-290
[10]  
RAIZER YP, 1997, GAS DISCHARGE, V1, P16
12