Persistent layer-by-layer sputtering of Au(111)

被引:7
作者
Murty, MVR
Couture, AJ
Cooper, BH
Woll, AR
Brock, JD
Headrick, RL
机构
[1] Cornell Univ, Dept Phys, Ithaca, NY 14853 USA
[2] Cornell Univ, Cornell Ctr Mat Res, Ithaca, NY 14853 USA
[3] Cornell Univ, Sch Appl & Engn Phys, Ithaca, NY 14853 USA
[4] Cornell Univ, Cornell High Energy Synchrotron Source, Wilson Lab, Ithaca, NY 14853 USA
关键词
D O I
10.1063/1.373703
中图分类号
O59 [应用物理学];
学科分类号
摘要
Persistent layer-by-layer removal of Au(111) during Ar+ ion irradiation was observed in a real-time x-ray scattering study. Over 100 specular beam intensity oscillations were measured. For a given ion energy, a smoother surface morphology is obtained when the ion flux is reduced. For a fixed erosion rate, ion energy in the range of 70-500 eV does not have a strong influence on the evolution of surface morphology. Diffuse scattering measurements show the development of features with a characteristic lateral length scale on the surface during ion irradiation. (C) 2000 American Institute of Physics. [S0021-8979(00)06213-7].
引用
收藏
页码:597 / 599
页数:3
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