Wall angle measurement with a scanning probe microscope employing a one-dimensional force sensor

被引：3

作者：

Griffith, JE

Hopkins, LC

Bryson, CE

Berghaus, A

Snyder, EJ

Plombon, JJ

Vasilyev, LA

Hecht, M

Bindell, JB

机构：

[1] AT&T Bell Labs, Lucent Technol, Murray Hill, NJ 07974 USA

[2] Surface Interface Inc, Sunnyvale, CA 94086 USA

[3] Lucent Technol, Orlando, FL 32819 USA

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1997年 / 15卷 / 06期

关键词：

D O I：

10.1116/1.589611

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

To measure the angle of a wall, the probe of a stylus profiler must be able to reach the wall. Sample tilting substantially expands the range of wall angles accessible to a profiler, Tilting also allows flared probe tip characterizers to be used more efficiently. The balance beam force sensor used for this work was designed to permit significant sample tilting. (C) 1997 American Vacuum Society.

引用

页码：2189 / 2192

页数：4

共 11 条

[1]

Griffith J E, 1994, US Patent, Patent No. 5307693

[2] A SCANNING TUNNELING MICROSCOPE WITH A CAPACITANCE-BASED POSITION MONITOR [J].