Properties of multilayer and alloyed PVD films on the base of TiN

被引：9

作者：

Andrievski, RA

机构：

[1] Institute for New Chemical Problems, Russian Academy of Sciences, Chernogolovka

来源：

INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS | 1996年 / 14卷 / 1-3期

关键词：

D O I：

10.1016/0263-4368(96)83423-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The multilayer and alloyed films of TiN, ZrN, NbN and CrN produced by are deposition were investigated with use of X-ray diffraction, electron microscopy and microhardness measurements. A general tendency of the microhardness to increase with decreasing layer thickness was found in TiN-NbN(ZrN) systems. The microhardness maximum value (similar to 8000 HV 0.1) was formed in TiN-NbN multilayer films. The influence of spinodal decomposition, recrystallization, and heterodiffusion on the films' microhardness is also demonstrated.

引用

页码：105 / 107

页数：3

共 7 条

[1] STRUCTURE AND MICROHARDNESS OF TIN COMPOSITIONAL AND ALLOYED FILMS [J].