Properties of composite Ti(NCO) layers formed on tool steel under glow discharge conditions

被引:3
作者
Kim, SK [1 ]
Wierzchon, T
Sobiecki, JR
机构
[1] Univ Ulsan, Dept Met Engn, Kyung Nam 680749, South Korea
[2] Warsaw Univ Technol, Dept Mat Sci & Engn, PL-02524 Warsaw, Poland
关键词
PACVD process; Ti(NCO) layer; glow discharge;
D O I
10.1016/S0257-8972(97)00350-2
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Recently, metallo-organic compounds have become the donors of titanium in the PACVD process because a chlorine atmosphere is to be avoided. A Ti(NCO) layer was formed on tool steel by using titanium tetraisopropoxide, hydrogen and nitrogen under glow discharge conditions. This process was combined with the plasma nitriding process to obtain composite Ti(NCO) layers on tool steel. The layers thus obtained had high hardness, good wear and corrosion-resistant properties. Detailed results on the structure and properties of this layer are presented. (C) 1997 Elsevier Science S.A.
引用
收藏
页码:268 / 271
页数:4
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