共 9 条
[2]
Kikuchi N., 1984, Proceedings of the Ninth International Conference on Chemical Vapor Deposition 1984, P728
[4]
PLASMA-ASSISTED CHEMICAL VAPOR-DEPOSITION OF HARD COATINGS WITH METALLOORGANIC COMPOUNDS
[J].
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING,
1991, 139 (1-2)
:61-66
[5]
RIE KT, 1987, P 6 EUR C CHEM VAP D, P311
[7]
WIERZCHON T, 1992, J MATER SCI, V27, P771, DOI 10.1007/BF02403895
[8]
Wierzchon T., 1990, Surface Engineering, V6, P294