High-κ oxide nanoribbons as gate dielectrics for high mobility top-gated graphene transistors

被引:170
作者
Liao, Lei [2 ]
Bai, Jingwei [1 ]
Qu, Yongquan [2 ]
Lin, Yung-chen [1 ]
Li, Yujing [1 ]
Huang, Yu [1 ,3 ]
Duan, Xiangfeng [2 ,3 ]
机构
[1] Univ Calif Los Angeles, Dept Mat Sci & Engn, Los Angeles, CA 90095 USA
[2] Univ Calif Los Angeles, Dept Chem & Biochem, Los Angeles, CA 90095 USA
[3] Univ Calif Los Angeles, Calif Nanosyst Inst, Los Angeles, CA 90095 USA
基金
美国国家卫生研究院;
关键词
graphene dielectric integration; carrier mobility; dielectric nanoribbon; nanoelectronics; FIELD-EFFECT TRANSISTORS; ATOMIC LAYER DEPOSITION; CARBON NANOTUBES; NANOBELTS; FILMS; ELECTRONICS; AL2O3;
D O I
10.1073/pnas.0914117107
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Deposition of high-kappa dielectrics onto graphene is of significant challenge due to the difficulties of nucleating high quality oxide on pristine graphene without introducing defects into the monolayer of carbon lattice. Previous efforts to deposit high-kappa dielectrics on graphene often resulted in significant degradation in carrier mobility. Here we report an entirely new strategy to integrate high quality high-kappa dielectrics with graphene by first synthesizing freestanding high-kappa oxide nanoribbons at high temperature and then transferring them onto graphene at room temperature. We show that single crystalline Al2O3 nanoribbons can be synthesized with excellent dielectric properties. Using such nanoribbons as the gate dielectrics, we have demonstrated top-gated graphene transistors with the highest carrier mobility (up to 23,600 cm(2)/V . s) reported to date, and a more than 10-fold increase in transconductance compared to the back-gated devices. This method opens a new avenue to integrate high-kappa dielectrics on graphene with the preservation of the pristine nature of graphene and high carrier mobility, representing an important step forward to high-performance graphene electronics.
引用
收藏
页码:6711 / 6715
页数:5
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