Adsorption of fluorine on bare, hydrogen- and hydrocarbon-covered diamond C(111) surfaces

被引:6
作者
Yamada, T
Seki, H
Chuang, TJ
机构
[1] Waseda Univ, Kagami Mem Lab Mat & Technol, Shinjuku Ku, Tokyo 1690051, Japan
[2] IBM, Almaden Res Ctr, San Jose, CA 95120 USA
[3] Natl Taiwan Univ, Ctr Condensed Matter Sci, Taipei 10764, Taiwan
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 2000年 / 39卷 / 4A期
关键词
diamond single crystal; hydrogen; fluorine; X-ray photoelectron spectroscopy; low-energy electron diffraction;
D O I
10.1143/JJAP.39.1826
中图分类号
O59 [应用物理学];
学科分类号
摘要
The adsorption of fluorine delivered as xenon difluoride has been examined on a bare diamond C(111)(2 x 1) surface as well as modified surfaces of hydrogen-terminated H:C(111)(1 x 1) and hydrocarbon-precovered CH3/C(111) by means of Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy (XPS) and low-energy electron diffraction (LEED). The F intake by bare C(111)(2 x 1) at nearly 10(5) Langmuir of XeF2 exposure reached close to two monolayers on C(111). The adsorbed F was removed by annealing to 1400 K in vacuum, and was replaced by atomic hydrogen generated by a hot filament. The saturation coverage of F on H:C(111)(1 x 1) was one monolayer. The adsorbed F on H:C(III)(I x 1) was removed by annealing to 1300 K and H:C(111)(1 x 1) was restored. On C(111) precovered with CH3 groups, the initial sticking probability of F was definitely smaller than that of C(1 1 1)(2 x 1). The adsorbed F was less stable and desorbed completely at 1200 K. The structures of adsorbed F on C(111)(2 x 1) and H:C(111)(1 x 1) are discussed.
引用
收藏
页码:1826 / 1834
页数:9
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