Application of amorphous silicon subwavelength gratings in polarization switching vertical-cavity surface-emitting lasers

被引:7
作者
Chou, SY [1 ]
Schablitsky, SJ [1 ]
Zhuang, L [1 ]
机构
[1] Univ Minnesota, Dept Elect Engn, Nanostruct Lab, Minneapolis, MN 55455 USA
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1997年 / 15卷 / 06期
关键词
D O I
10.1116/1.589745
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Amorphous silicon subwavelength gratings have been fabricated. Their use as quarter-wave plates in polarization switching vertical-cavity surface-emitting lasers with tunable oscillation frequency as high as several terahertz is proposed. The substantial increase in frequency comes from a reduction in the oscillator cavity length due to the small thickness of the grating (only about one-third of the wavelength thick). The frequency tuning is provided by fabricating the wave plate and a partial reflector monolithically on a movable microcantilever. (C) 1997 American Vacuum Society.
引用
收藏
页码:2864 / 2867
页数:4
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