VERTICAL-CAVITY SURFACE-EMITTING LASERS - DESIGN, GROWTH, FABRICATION, CHARACTERIZATION

被引：420

作者：

JEWELL, JL ^{[1
]}

HARBISON, JP ^{[1
]}

SCHERER, A ^{[1
]}

LEE, YH ^{[1
]}

FLOREZ, LT ^{[1
]}

机构：

[1] BELL COMMUN RES INC,RED BANK,NJ 07701

来源：

IEEE JOURNAL OF QUANTUM ELECTRONICS | 1991年 / 27卷 / 06期

关键词：

D O I：

10.1109/3.89950

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have designed, fabricated, and tested vertical-cavity surface-emitting lasers (VCSEL) with diameters ranging from 0.5-mu-m to > 50-mu-m. The approaches we have taken have produced (not necessarily by us) the smallest, the lowest threshold, the highest quantum efficiency, and the highest modulation speed VCSEL's to date. The four principal sections of this paper-design issues, molecular beam epitaxial growth, fabrication, and lasing characteristics - are written by people who are closely involved in their development.

引用

页码：1332 / 1346

页数：15

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