Atomic layer deposition of Y2O3/ZrO2 nanolaminates -: A route to ultrathin solid-state electrolyte membranes

被引：23

作者：

Ginestra, Cynthia N. ^{[1
]}

Sreenivasan, Raghavasimhan

Karthikeyan, Annamalai

Ramanathan, Shriram

McIntyre, Paul C.

机构：

[1] Stanford Univ, Dept Mat Sci & Engn, Stanford, CA 94305 USA

[2] Harvard Univ, Sch Engn & Appl Sci, Cambridge, MA 02138 USA

来源：

ELECTROCHEMICAL AND SOLID STATE LETTERS | 2007年 / 10卷 / 10期

关键词：

YTTRIA-DOPED ZIRCONIA; OXIDE FUEL-CELLS; STABILIZED ZIRCONIA; IONIC-CONDUCTIVITY; THIN-FILMS;

D O I：

10.1149/1.2759606

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

We report on the growth and electrochemical properties of nanoscale (20-35 nm) yttria-zirconia alloys synthesized using a laminate approach via atomic layer deposition. We observed metal oxide layer interdiffusion in relatively long-period (similar to 10 nm) nanolaminates by depth profiling analysis after 950 degrees C anneals. Short-period (<1 nm) nanolaminates were amorphous as deposited but appeared to be completely interdiffused with a polycrystalline, tetragonal structure after similar anneals. Electrochemical characterization of annealed, short-period nanolaminate yttria-stabilized zirconia (YSZ) films containing 3 mol % Y2O3 (3YSZ) indicated significant enhancement of total electrical conductivity compared to reported bulk values for this composition. (C) 2007 The Electrochemical Society.

引用

页码：B161 / B165

页数：5

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