Vertical tunnel field-effect transistor with bandgap modulation and workfunction engineering

被引:11
作者
Bhuwalka, KK [1 ]
Schulze, J [1 ]
Eisele, I [1 ]
机构
[1] Univ German Fed Armed Forces, Inst Phys, D-85577 Neubiberg, Germany
来源
ESSDERC 2004: PROCEEDINGS OF THE 34TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE | 2004年
关键词
D O I
10.1109/ESSDER.2004.1356534
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A molecular beam epitaxy grown vertical tunnel field-effect transistor based on hand-to-hand tunneling has already been proposed. Based on silicon, it showed some remarkable properties. However, it failed to meet the technology requirements in terms of on-current and threshold voltage. Improvement in the n-channel device performance by bandgap modulation at the tunneling junction using a thin deltap(+) SiGe layer has been shown. However, as the germanium mole fraction, x, is increased in SiGe, even though the on-current, I-on, threshold voltage, V-T, and sub-threshold swing, S, all show improved behavior, the leakage currents, I-off, is seen to increase significantly as tunneling probability becomes significant even at zero gate bias. In this work, we further present the improvement in the device performance using gate workfunction engineering along with bandgap modulation at the tunnel junction. As bandgap modulation leads to improved S and can be scaled to below 60 mV/dec independent of temperature, T, we show, by means of 2-D computer simulations that it is possible to achieve very low off-currents and very high on-currents for the tunnel FET.
引用
收藏
页码:241 / 244
页数:4
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