Corner-cube retroreflectors based on structure-assisted assembly for free-space optical communication

被引：103

作者：

Zhou, LX ^{[1
]}

Kahn, JM ^{[1
]}

Pister, KSJ ^{[1
]}

机构：

[1] Univ Calif Berkeley, Dept Elect Engn & Comp Sci, Berkeley, CA 94720 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2003年 / 12卷 / 03期

关键词：

assembly; corner-cube retroreflector; free-space communication; microelectromechanical systems (MEMS);

D O I：

10.1109/JMEMS.2003.809956

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have fabricated sub-millimeter-sized quad corner-cube retroreflectors (CCRs) for free-space optical communication. Each quad CCR structure comprises three mirrors micromachined from silicon-on-insulator wafers, and is designed to facilitate manual assembly with accurate angular alignment. Assembled CCRs exhibit mirror nonflatness less than 50 nm, mirror roughness less than 2 nm, and mirror misalignment less than 1 mrad, leading to near-ideal optical performance. The quad CCR incorporates a gap-closing actuator to deflect a base mirror common to the four CCRs, allowing their reflectivity to be modulated up to 7 kb/s by a drive voltage less than 5 V. We have demonstrated a 180-m free-space optical communication link using a CCR as a passive optical transmitter. Quad CCRs have been integrated into miniature, autonomous nodes that constitute a distributed wireless sensor network. We present an analysis of the signal-to-noise ratio of CCR-based links, considering the impact of CCR dimensions, ambient light noise, and other factors.

引用

页码：233 / 242

页数：10

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