Highly sensitive ZnO ozone detectors at room temperature

被引：55

作者：

Bender, M

Fortunato, E

Nunes, P

Ferreira, I

Marques, A

Martins, R

Katsarakis, N

Cimalla, V

Kiriakidis, G

机构：

[1] Fdn Res & Technol Hellas, Photon & Elect Mat Lab, Inst Elect Struct & Laser, Iraklion 71110, Crete, Greece

[2] Univ Nova Lisboa, Dept Mat Sci, CENIMAT, Fac Sci & Technol, P-2829516 Caparica, Portugal

[3] Univ Nova Lisboa, CEMOP, P-2829516 Caparica, Portugal

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 2003年 / 42卷 / 4B期

关键词：

ozone sensors; oxide semiconductors; ZnO thin films; nanostructured oxides;

D O I：

10.1143/JJAP.42.L435

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In this letter we compare the room temperature ozone sensing properties of intrinsic zinc oxide (ZnO) thin films deposited by spray pyrolysis, dc and r.f. magnetron sputtering. Their sensor response exceeds 8 orders of magnitude when the film structure is constituted by nanocrystallites. These preliminary results clearly demonstrate that the films could be potentially used for ozone detection at room temperature.

引用

收藏

页码：L435 / L437

页数：3

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