Directed Self-Assembly of Block Copolymers on Two-Dimensional Chemical Patterns Fabricated by Electro-Oxidation Nano lithography

被引:55
作者
Xu, Ji [1 ]
Park, Soojin [3 ]
Wang, Shiliu [4 ]
Russell, Thomas P. [1 ]
Ocko, Benjamin M. [2 ]
Checco, Antonio [2 ]
机构
[1] Univ Massachusetts, Dept Polymer Sci & Engn, Amherst, MA 01003 USA
[2] Brookhaven Natl Lab, Condensed Matter Phys & Mat Sci Dept, Upton, NY 11973 USA
[3] Ulsan Natl Inst Sci & Technol, Sch Energy Engn, Ulsan, South Korea
[4] Deerfield Acad, Deerfield, MA 01342 USA
基金
美国国家科学基金会;
关键词
DIBLOCK COPOLYMER; THIN-FILMS; NANOSTRUCTURES; TEMPLATES; ARRAYS; RANGE; SURFACES; ROUTE; GRAPHOEPITAXY;
D O I
10.1002/adma.200903640
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
A hexagonal web of carboxylic-terminated nanostripes (left image, bright areas) is patterned onto a methyl-terminated surface of an octadecyltrichlorosilane monolayer. A thermally annealed polystyrene-block-poly(ethylene oxide) (PS-b-PEO) thin-film, spin-cast on the chemical pattern (right image), exhibits surface normal oriented cylindrical PEO microdomains on the methyl-terminated regions only. These chemical patterns effectively template the order and spatial orientation of diblock-copolymer microdomains.
引用
收藏
页码:2268 / +
页数:6
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