A novel method of fabrication of microlens arrays

被引：13

作者：

Chen, SH ^{[1
]}

Yi, XJ

Ma, H

机构：

[1] Huazhong Univ Sci & Technol, Dept Optoelect Engn, Wuhan 430074, Peoples R China

[2] Huazhong Univ Sci & Technol, State Key Lab Laser Technol, Wuhan 430074, Peoples R China

来源：

INFRARED PHYSICS & TECHNOLOGY | 2003年 / 44卷 / 02期

关键词：

self-alignment; diffractive microlens arrays; diffraction efficiency;

D O I：

10.1016/S1350-4495(02)00191-3

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A new self-alignment process to fabricate microlens arrays is introduced. By this method, during the fabrication process, the rigorous alignment is avoided which has great effect on diffraction efficiency in the conventional multi-photolithography process. The large arrays of 1500 x 640 element silica microlens are manufactured by this method. The measurement results show that the eight-phase-level microlens arrays diffraction efficiency is as high as 93%. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：133 / 135

页数：3

共 4 条

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Chen, SH ;

Yi, XJ ;

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He, M ;

Chen, SX ;

Kong, LB .

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