Surface resistance imaging with a scanning near-field microwave microscope

被引：75

作者：

Steinhauer, DE

Vlahacos, CP

Dutta, SK

Wellstood, FC

Anlage, SM

机构：

[1] Department of Physics, Ctr. for Superconductivity Research, University of Maryland, College Park, MD

来源：

APPLIED PHYSICS LETTERS | 1997年 / 71卷 / 12期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.120020

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We describe near-field imaging of sample sheet resistance via frequency shifts in a resonant coaxial scanning microwave microscope. The frequency shifts are related to local sample properties, such as surface resistance and dielectric constant. We use a feedback circuit to track a given resonant frequency, allowing measurements with a sensitivity to frequency shifts as small as two parts in 10(6) for a 30 ms sampling time. The frequency shifts can be converted to sheet resistance based on a simple model of the system. (C) 1997 American Institute of Physics.

引用

收藏

页码：1736 / 1738

页数：3

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