Characterization of (Ba0.5Sr0.5)TiO3 thin films for Ku-band phase shifters

被引：8

作者：

Mueller, CH ^{[1
]}

Van Keuls, FW

Romanofsky, RR

Miranda, FA

Warner, JD

Canedy, CL

Ramesh, R

机构：

[1] NASA, Glenn Res Ctr, Space Elect Div, Cleveland, OH 44135 USA

[2] Univ Maryland, College Pk, MD 20742 USA

来源：

INTEGRATED FERROELECTRICS | 2000年 / 29卷 / 1-2期

关键词：

ferroelectric; paraelectric; thin film; microstructure; phase shifter;

D O I：

10.1080/10584580008222227

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The microstructural properties of (Ba0.5Sr0.5)TiO3(BSTO) thin films (300, 700, and 1400 nm thick) deposited on LaAlO3 (LAO) substrates were characterized using high-resolution x-ray diffractometery. Film crystallinity was the parameter that most directly influenced tunability, and we observed that a) the crystalline quality was highest in the thinnest film and progressively degraded with increasing film thickness; and b) strain at the film/substrate interface was completely relieved via dislocation formation. Paraelectric films such as BSTO offer an attractive means of incorporating low-cost phase shifter circuitry into beam-steerable reflectarray antennas.

引用

页码：139 / 149

页数：11

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