Emergent Chemical Mapping at Atomic-Column Resolution by Energy-Dispersive X-Ray Spectroscopy in an Aberration-Corrected Electron Microscope

被引：101

作者：

Chu, M. -W. ^{[1
]}

Liou, S. C. ^{[1
]}

Chang, C. -P. ^{[1
,2
]}

Choa, F. -S. ^{[3
]}

Chen, C. H. ^{[1
,4
,5
]}

机构：

[1] Natl Taiwan Univ, Ctr Condensed Matter Sci, Taipei 106, Taiwan

[2] Natl Taiwan Univ, Dept Mat Sci & Engn, Taipei 106, Taiwan

[3] Univ Maryland, Dept Comp Sci & Elect Engn, Baltimore, MD 21250 USA

[4] Natl Taiwan Univ, Dept Phys, Taipei 106, Taiwan

[5] Acad Sinica, Inst Atom & Mol Sci, Taipei 106, Taiwan

来源：

PHYSICAL REVIEW LETTERS | 2010年 / 104卷 / 19期

关键词：

STEM; DELOCALIZATION; IONIZATION; EELS;

D O I：

10.1103/PhysRevLett.104.196101

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

Chemical mapping at atomic-column resolution by energy-dispersive x-ray spectroscopy in a spherical aberration-corrected scanning transmission electron microscope (STEM) has been demonstrated for the 1.47-angstrom dumbbell structure in InGaAs. The structural imaging and the chemical information in the two-dimensional map are directly correlated. Comparisons with the other existing mapping techniques of STEM in conjunction with electron energy-loss spectroscopy were discussed from aspects of ionization interactions.

引用

页数：4

共 24 条

[1] Atomic-resolution electron energy loss spectroscopy imaging in aberration corrected scanning transmission electron microscopy [J].

Allen, LJ ;

Findlay, SD ;

Lupini, AR ;

Oxley, MP ;

Pennycook, SJ .

PHYSICAL REVIEW LETTERS, 2003, 91 (10)

[2] DELOCALIZATION IN ELECTRON-IMPACT IONIZATION IN A CRYSTALLINE ENVIRONMENT [J].

ALLEN, LJ ;

ROUSSOUW, CJ .

PHYSICAL REVIEW B, 1993, 47 (05) :2446-2452

[3]

[Anonymous], 2009, Transmission Electron Microscopy: A Textbook for Materials Science

[4] Two-dimensional mapping of chemical information at atomic resolution [J].

Bosman, M. ;

Keast, V. J. ;

Garcia-Munoz, J. L. ;

D'Alfonso, A. J. ;

Findlay, S. D. ;

Allen, L. J. .

PHYSICAL REVIEW LETTERS, 2007, 99 (08)

[5] Grain boundary strengthening in alumina by rare earth impurities [J].

Buban, JP ;

Matsunaga, K ;

Chen, J ;

Shibata, N ;

Ching, WY ;

Yamamoto, T ;

Ikuhara, Y .

SCIENCE, 2006, 311 (5758) :212-215

[6] Atomic-resolution chemical mapping using energy-dispersive x-ray spectroscopy [J].

D'Alfonso, A. J. ;

Freitag, B. ;

Klenov, D. ;

Allen, L. J. .

PHYSICAL REVIEW B, 2010, 81 (10)

[7] Upper limits for the residual aberrations of a high-resolution aberration-corrected STEM [J].

Haider, M ;

Uhlemann, S ;

Zach, J .

ULTRAMICROSCOPY, 2000, 81 (3-4) :163-175

[8] A practical approach for STEM image simulation based on the FFT multislice method [J].

Ishizuka, K .

ULTRAMICROSCOPY, 2002, 90 (2-3) :71-83

[9] Decisive factors for realizing atomic-column resolution using STEM and EELS [J].

Kimoto, Koji ;

Ishizuka, Kazuo ;

Matsui, Yoshio .

MICRON, 2008, 39 (03) :257-262

[10] Element-selective imaging of atomic columns in a crystal using STEM and EELS [J].

Kimoto, Koji ;

Asaka, Toru ;

Nagai, Takuro ;

Saito, Mitsuhiro ;

Matsui, Yoshio ;

Ishizuka, Kazuo .

NATURE, 2007, 450 (7170) :702-704

← 1 2 3 →