Fabrication of photonic band gap crystal using microtransfer molded templates

被引:14
作者
Leung, WY [1 ]
Kang, H
Constant, K
Cann, D
Kim, CH
Biswas, R
Sigalas, MM
Ho, KM
机构
[1] Iowa State Univ, Ctr Microelect Res, Ames, IA 50011 USA
[2] Iowa State Univ, US DOE, Ames Lab, Ames, IA 50011 USA
[3] Iowa State Univ, Dept Mat Sci & Engn, Ames, IA 50011 USA
[4] Iowa State Univ, Dept Phys & Astron, Ames, IA 50011 USA
[5] Agilent Lab, Palo Alto, CA 94304 USA
关键词
D O I
10.1063/1.1568548
中图分类号
O59 [应用物理学];
学科分类号
摘要
We have proposed and demonstrated an economical technique to fabricate a three-dimensional layer-by-layer photonic band gap structure in the infrared wavelengths. An organic polymer template structure, an inverse layer-by-layer photonic crystal structure, is assembled using the microtransfer molding technique. This template is infiltrated with sol-gel or nanoparticle titanium oxide slurry, then later removed by heat treatment at a temperature range of 550-800 degreesC. This method can be extended to fabricate photonic crystals operating at optical and ultraviolet frequencies. (C) 2003 American Institute of Physics.
引用
收藏
页码:5866 / 5870
页数:5
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