An application of AHP and sensitivity analysis for selecting the best slicing machine

被引:174
作者
Chang, Che-Wei
Wu, Cheng-Ru
Lin, Chin-Tsai
Chen, Huang-Chu
机构
[1] Yuanpei Univ, Dept Informat Management, Hsinchu 30015, Taiwan
[2] Yuanpei Univ, Dept Finance, Hsinchu 30015, Taiwan
[3] Yuanpei Univ, Grad Inst Business & Management, Hsinchu 30015, Taiwan
关键词
silicon wafer slicing; Analytical Hierarchy Process; EWMA; sensitivity analysis;
D O I
10.1016/j.cie.2006.11.006
中图分类号
TP39 [计算机的应用];
学科分类号
081203 ; 0835 ;
摘要
Wafer slicing is a complex manufacturing process, complicating efforts to monitor process stability and quality control effectively. This study discusses and develops a manufacturing quality yield model for forecasting 12 in. silicon wafer slicing based on the Analytic Hierarchy Process (AHP) framework. Decision Makers can select evaluation outcomes to identify the most precise machine. Additionally, EWMA control chart is presented to demonstrate and verify the feasibility and effectiveness of the proposed AHP-based algorithm. Finally, sensitivity analysis is performed to test the stability of the priority ranking. Therefore, this work illustrates how the AHP model would be implemented to help engineers determine the manufacturing process yield quickly and effectively. (c) 2007 Elsevier Ltd. All rights reserved.
引用
收藏
页码:296 / 307
页数:12
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