Analysis of a one-dimensional, steady-state magnetron discharge

A semi-analytic method of solution of one-dimensional electron and ion fluid transport equations for a steady-state magnetized discharge has been developed by generalizing a previous analysis of an unmagnetized steady-state glow discharge. A discharge normal to the magnetic field can operate in one of two modes, a positive space charge (PSC) mode, characterized by a strong cathode fall, and a negative space charge (NSC) mode, characterized by a broad anode fall. The transition from the PSC mode to the NSC mode as the magnetic field is increased or the pressure is reduced is demonstrated. The results are in qualitative agreement with results from a one-dimensional (in space) particle-in-cell simulation. The relation of these results to experiments in discharges such as magnetrons is discussed.