Fast response methane sensor using nanocrystalline zinc oxide thin films derived by sol-gel method

被引：139

作者：

Bhattacharyya, P. ^{[1
]}

Basu, P. K. ^{[1
]}

Saha, H. ^{[1
]}

Basu, S. ^{[1
]}

机构：

[1] Univ Jadavpur, Dept Elect & Telecommun Engn, IC Design & Fabricat Ctr, Kolkata 700032, India

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2007年 / 124卷 / 01期

关键词：

sol-gel; nanocrystalline zinc oxide; methane sensor; Pd-Ag (26%) contact; fast response;

D O I：

10.1016/j.snb.2006.11.046

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Undoped nanocrystalline n-ZnO thin films were deposited on SiO2-coated p-Si substrates by sol-gel technique to fabricate ZnO-based resistive sensors for methane detection. The resistance change was studied at different temperatures (50, 150, 200, 250, 300 and 350 degrees C) with two different metallic contacts to ZnO, e.g. gold and palladium-silver, in: air and in the presence of three different concentrations (0.1, 0.5 and 1%) of methane in N-2 carrier gas. The response, response time and recovery. time were studied in detail. A significant improvement of the sensor performance was observed with a Pd-Ag (26%) contact. The maximum response of 74.3% and the lowest response time of 16.3 s were obtained at 250 degrees C using the Pd-Ag (26%) catalytic metal contact to ZnO. The mechanism of sensing by ZnO was suggested similar to that of the SnO2 sensors reported by Yamazoe. (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：62 / 67

页数：6

共 26 条

[1] Study of optical properties of some sol-gel derived films of ZnO [J].

Bandyopadhyay, S ;

Paul, GK ;

Sen, SK .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2002, 71 (01) :103-113

[2] Methane sensitivity of Fe-doped SnO2 thick films [J].

Bose, S ;

Chakraborty, S ;

Ghosh, BK ;

Das, D ;

Sen, A ;

Maiti, HS .

SENSORS AND ACTUATORS B-CHEMICAL, 2005, 105 (02) :346-350

[3] Exciton photoluminescence of hexagonal ZnO [J].

Butkhuzi, TV ;

Chelidze, TG ;

Georgobiani, AN ;

Jashiashvili, DL ;

Khulordava, TG ;

Tsekvava, BE .

PHYSICAL REVIEW B, 1998, 58 (16) :10692-10695

[4] TRANSPARENT CONDUCTORS - A STATUS REVIEW [J].

CHOPRA, KL ;

MAJOR, S ;

PANDYA, DK .

THIN SOLID FILMS, 1983, 102 (01) :1-46

[5] SELECTIVITY AND STABILITY OF A TIN DIOXIDE SENSOR FOR METHANE [J].

DEANGELIS, L ;

RIVA, R .

SENSORS AND ACTUATORS B-CHEMICAL, 1995, 28 (01) :25-29

[6] A SELECTIVE CH4 SENSOR USING SEMICONDUCTING GA2O3 THIN-FILMS BASED ON TEMPERATURE SWITCHING OF MULTIGAS REACTIONS [J].

FLEISCHER, M ;

MEIXNER, H .

SENSORS AND ACTUATORS B-CHEMICAL, 1995, 25 (1-3) :544-547

[7] A novel gas sensor design based on CH4/H2/H2O plasma etched ZnO thin films [J].

Gruber, D ;

Kraus, F ;

Müller, J .

SENSORS AND ACTUATORS B-CHEMICAL, 2003, 92 (1-2) :81-89

[8] Tin oxide-based methane gas sensor promoted by alumina-supported Pd catalyst [J].

Kim, JC ;

Jun, HK ;

Huh, JS ;

Lee, DD .

SENSORS AND ACTUATORS B-CHEMICAL, 1997, 45 (03) :271-277

[9] Function and applications of gas sensors [J].

Kohl, D .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2001, 34 (19) :R125-R149

[10] Zinc oxide thin films by the spray pyrolysis method [J].

Krunks, M ;

Mellikov, E .

THIN SOLID FILMS, 1995, 270 (1-2) :33-36

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