Low-temperature synthesis of ITO thin films using an ultraviolet laser for conductive coating on organic polymer substrates

被引：33

作者：

Asakuma, N ^{[2
]}

Fukui, T

Toki, M

Imai, H

机构：

[1] Kansai Res Inst, Shimogyo Ku, Kyoto 6008813, Japan

[2] Keio Univ, Fac Sci & Technol, Dept Appl Chem, Kohoku Ku, Yokohama, Kanagawa 2238522, Japan

来源：

JOURNAL OF SOL-GEL SCIENCE AND TECHNOLOGY | 2003年 / 27卷 / 01期

关键词：

ITO; organic polymer; ultraviolet laser; sol-gel;

D O I：

10.1023/A:1022640228969

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The resistivity of sol-gel-derived indium tin oxide (ITO) films effectively decreased with crystallization by exposure to a low fluence UV beam (10-20 mJ/cm(2)) from an ArF laser. The increase in temperature at the surface of the films was below 10degreesC under the irradiation condition. Thus, conductive and transparent ITO coatings were successfully obtained on polyethylene terephthalate and polyimide sheets using a sol-gel route assisted with an ultraviolet laser beam.

引用

页码：91 / 95

页数：5

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