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SOL-GEL DERIVED, AIR-BAKED INDIUM AND TIN OXIDE-FILMS

被引：85
作者：
MATTOX, DM
机构：
[1] University of Missouri-Rolla, Rolla, MO 65401
来源：
THIN SOLID FILMS | 1991年 / 204卷 / 01期
关键词：
D O I：
10.1016/0040-6090(91)90491-F
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A sol gel derived, transparent, electrically conducting tin-doped In2O3 film system has been developed which only requires air baking. The films approximate the properties of sputtered and hot-sprayed films but are simpler and less expensive to apply by dipping and spinning procedures. Substrate sodium interference was seen to be minimal.
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页码：25 / 32
页数：8
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