共 39 条
[4]
Femtosecond laser ablation of silicon-modification thresholds and morphology
[J].
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,
2002, 74 (01)
:19-25
[5]
Sub-surface damage in indium phosphide caused by micromachining of grooves with femtosecond and nanosecond laser pulses
[J].
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,
2004, 79 (08)
:1887-1890
[10]
Femtosecond laser irradiation of metal and thermal oxide layers on silicon: studies utilising cross-sectional transmission electron microscopy
[J].
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,
2008, 91 (03)
:473-478