Silicon microphone with wide frequency range and high linearity

被引：21

作者：

Iguchi, Yoshinori

Goto, Masahide

Iwaki, Masakazu

Ando, Akio

Tanioka, Kenkichi

Tajima, Toshifumi

Takeshi, Futoshi

Matsunaga, Susumu

Yasuno, Yoshinobu

机构：

[1] Japan Biocasting Corp, Sci & Tech Res Labs, Setagaya Ku, Tokyo 1578510, Japan

[2] Panas Semicond Device Solut Co Ltd, Tsuzuki Ku, Yokohama, Kanagawa 2248539, Japan

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2007年 / 135卷 / 02期

关键词：

MEMS; microphone; bonded wafer;

D O I：

10.1016/j.sna.2006.08.016

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports a silicon microphone with a wide frequency range and high linearity and its novel fabrication process. The transducer has a monolithic structure and is simply fabricated from a bonded silicon wafer. A frequency range from 30 Hz to 20 kHz, which covers the audio frequency, and a total harmonic distortion less than 0.3% at a sound pressure level of 20 Pa (120 dB(SPL)) are obtained. The measured sensitivity of the transducer is -52 dBV/Pa (1 kHz), which is in good agreement with the calculated value. (c) 2006 Elsevier B.V. All rights reserved.

引用

收藏

页码：420 / 425

页数：6

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